- Microanalysis of samples provides information on specific elemental/chemical composition based on energy of x-rays emitted. The bright areas of the image indicate high atomic number elements and dark areas indicate low atomic number elements
- It is also used to indicate contamination, failure analysis, material identification.
- It is widely used in geological samples and forensic sciences.
Energy dispersive X-Ray spectroscopy (EDS) is an analytical technique to obtain information on the elemental/ chemical composition of the sample using x-rays emitted by the interaction between the electron beam and the sample. Each element is identified based on the energy of xray emitted. As the electron beam in the SEM is scanned across the sample surface, x-ray fluorescence is emitted. The EDS system collects the x-rays and sorts them into different energy ranges and plots the peaks in the energy distribution and indicates the elements automatically.